منابع مشابه
Langmuir probe
Langmuir probes have been installed on satellites and sounding rockets to observe the general characteristics of thermal plasma in the ionosphere for more than five decades. Because of its simplicity and convenience, the Langmuir probe is one of the most frequently installed scientific instruments on spacecraft. While the algorithm to estimate the temperature and number density of thermal elect...
متن کاملLangmuir probe studies of a helicon plasma system
A commercial Trikon Technologies, Inc. Pinnacle 8000 helicon source plasma system for semiconductor etching was characterized with a radio frequency compensated Langmuir probe. The plasma parameters, including electron temperature, ion and electron density were measured with changes in the process conditions. The coil current ratios for constant magnetic fields were varied to demonstrate flexib...
متن کاملThe Langmuir Probe
INTRODUCTION: The Langmuir probe is a diagnostic device used to determine several basic properties of a plasma, such as temperature and density. A plasma is a state of matter which contains enough free (not bound to an atom) charged particles (electrons and ions) so that its dynamical behavior is dominated by electromagnetic forces. The subject of plasma physics is concerned mainly with ionized...
متن کاملHigh-speed dual Langmuir probe.
In an effort to temporally resolve the electron density, electron temperature, and plasma potential for turbulent plasma discharges, a unique high-speed dual Langmuir probe (HDLP) has been developed. A traditional single Langmuir probe of cylindrical geometry (exposed to the plasma) is swept simultaneously with a nearby capacitance and noise compensating null probe (fully insulated from the pla...
متن کاملDouble Langmuir probe measurement of plasma parameters in a dc glow discharge
In this paper, plasma main characteristics such as electron mean temperature, electron number density, and oscillation frequency have been measured experimentally using the double Langmuir probe diagnostic system. In our experiment, the plasma was generated by applying the low pressure dc glow discharge in several common gases. The experimental results indicated the highest plasma density and o...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2003
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1581362